About Tantalum sputtering targets
About Tantalum sputtering targets
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Sweeping the lean angle can improve film thickness uniformity and sidewall coverage whilst also avoiding substantial Electrical power-mirrored neutral species for vital processes.
In-situ optical monitoring and Management is on the market via Angstrom’s optical monitoring & Manage offer.
Focus on rotation and carousel indexing each have torque perception, stopping any process challenges as a result of slips or jams in rotation.
The size, situation, and equipment ratio of each World are optimized to deliver the absolute best attainable movie thickness uniformity.
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Variable angle stages make it possible for for very highly effective slender film procedures. On the other hand, amongst its biggest troubles is reproducibility. The substrate is commonly established at a very oblique angle in relation towards the resource, plus the films are really delicate towards the precision of the angle.
Angstrom Engineering® styles and engineers Just about every Reticle® platform to supply our associates while in the optics community the chance to build the movies they require with fantastic purity, density, and uniformity, all within a remarkably repeatable and automated trend.
Our exceptional structure permits direct or oblique checking on the variable angle phase, eradicating the necessity for tooling elements or perhaps a witness glass changer. Learn more concerning the Optical Checking & Regulate offer listed here.
In conjunction with sample rotation, the variable angle stage that is used for Reticle® delivers for in-designed angular motion throughout the deposition flux.
The IBSD method creates a extremely energetic flux of deposition material, leading to Tantalum sputtering targets movies with enhanced density, hardness, and area roughness in comparison with These deposited by evaporation processes.
The deposition ion source is directed toward a cloth target which has been optimized in both equally dimension and place with the needed deposition geometry.
Self-aligned ion optics are configured specifically for the specified deposition specifications and geometry of your respective system.
Angstrom Engineering’s Reticle® systems supply a switch-vital Remedy for the people aiming to comprehend any optical layout right into a high-effectiveness film.
A shuttered QCM located close to the substrate supplies opinions around the deposition price and Bodily thickness from the rising movie.
Each individual axis of movement is controlled via Aeres® utilizing precision servo motors, giving a lot better than 0.one levels of positional accuracy. Front aspect infrared heating bulbs tilt with the phase to supply a constant temperature profile for reactive processes.